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PVD6 Module
Multi-Target PVD Module

The PVD6 six target platform is ideal for multi-step thin film processes. Six targets located in a single chamber means that process vacuum never has to be broken to move between target materials.

S/N: VE-8280-100

  • Pumping System
    • CTI 14F Cryo Pump
    • CTI Water Pump
  • Table Size: 150mm
  • Number of Cathodes: 6
  • Number of Backing Plates: 6, 12” Each
  • Matching Network Box: Yes
  • Devicenet: No
  • Electronics Rack (Integrated / Separate): Separate
    • Power Supplies
      • (2) Kepco, Analog
      • ENI OEM-1250
  • Computer
    • Brooks Techware II – Plus

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