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5-Sided Central Wafer Handler

Five sided central wafer handlers are equipped to handle wafer sizes from 100mm to 200mm, and are compatible with all Veeco module types. The five sided handler is ideal for C1 (one added module) configurations.

  • Cluster: No
  • Tool Type: 5-Sided CWH
  • Tool Description: Veeco-Built 5-Sided CWH
    • Façade: No
    • Module 1
      • Type of module: 5-Sided CWH
      • Pumping System
        • None
      • Robot: Brooks VTR-5
      • Robot Arm: No
      • Number of Load Locks: 1
      • Type of Load Lock: VCE-2
      • Devicenet: No
      • Electronics Rack (Integrated / Separate): Separate
      • Computer
        • Comark

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