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K465i GaN MOCVD System- Through our Certified Partner, Surplus Global

The TurboDisc® K465i™ HP™ GaN MOCVD System features a high performance reactor designed to increase within-wafer wavelength uniformity by up to 20%.  The K465i HP MOCVD system is based on the production-proven K465i MOCVD system platform and provides higher productivity for HB-LED high-volume production fabs around the globe.  This system achieves superior uniformity and excellent run-to-run repeatability.  It also offers high productivity due to its full automation and shortened recovery period after maintenance.  The K465i HP MOCVD system is field upgradeable from the industry-leading K465i MOCVD system.

K465i GaN MOCVD System – 10075550 (S/N)

K465i Reactor Cart Assembly

  • Growth chamber
  • Flow Flange Assembly
  • Baseplate Assembly
  • Heater Assembly

Wafer Handling Assembly

  • Wafer Carrier (quantity 2)

Laminar Flow Hood Assembly

Growth Chamber Exhaust System

  • Process pump(s)
  • Manual & pneumatic ball valves
  • Particle filter assembly
  • Throttling valve

User Interface

  • Monitors, keyboard, & mouse

Rotary Transfer Assembly

  • Transfer  chamber with viewports
  • Dwell station
  • Vacuum robot

Electronics Control Module

  • Power supplies
  • Digital devices
  • H2 detector

Circuit Breaker Panel

Source Delivery & Reactor Housing Module

Modular Reconfigurable Gas Panel Includes:

  • Gas regulators
  • Hydride dopants
  • Vacuum leak check assembly

Process Module Assembly

Reactor Interface Flow Panel

  • Mass flow controllers
  • Alkyl injector block phantom MFC

Supply Gas Subassembly

  • NH3, H2, & N2

Hydride Dopant

  • Single input with dilution – SiH4

Slice #1:  Standard alkyl, single gas feed, single bubbler – TMAl

  • Multi-valve weldment manifold
  • Mass flow controllers and pressure controllers
  • Spool piece for binary gas monitor.

Slice #2:  Standard w/ Dilution, single gas feed, single bubbler – TMAl

  • Multi-valve weldment manifold
  • Mass flow controllers and pressure controllers
  • Spool piece for binary gas monitor.

Slice #3:  Standard w/dilution, single gas feed, single bubbler – TEGa

  • Multi-valve weldment manifold
  • Mass flow controllers and pressure controllers
  • Spool piece for binary gas monitor.

Slice #4:  Standard alkyl, single gas feed, single bubbler – TMGa

  • Multi-valve weldment manifold
  • Mass flow controllers
  • Spool piece for binary gas monitor

Slice #5:  Standard alkyl, single gas feed, single bubbler – TMGa

  • Multi-valve weldment manifold
  • Mass flow controllers and pressure controllers
  • Spool piece for binary gas monitor.

Slice #6:  Standard alkyl, single gas feed, single bubbler – Cp2Mg

  • Multi-valve weldment manifold
  • Mass flow controllers and pressure controllers
  • Spool piece for binary gas monitor.

Slice #7:  Standard alkyl, single gas feed, single bubbler – Cp2Mg

  • Multi-valve weldment manifold
  • Mass flow controllers and pressure controllers
  • Spool piece for binary gas monitor.

Slice #8:  Standard alkyl, single gas feed, single bubbler – TMIn

  • Multi-valve weldment manifold
  • Mass flow controllers and pressure controllers

Slice #9:  Standard alkyl, single gas feed, single bubbler – TMIn

  • Multi-valve weldment manifold
  • Mass flow controllers and pressure controllers

Binary Gas Monitor for TMIn #1, #2

Refrigeration Baths – (quantity = 7) 

Bubbler legs (quantity = 9 sets)

Material Demonstration, standard GaN on Sapphire 

Insitu Monitoring System

RealTemp200 Monitoring System (quantity = 2)

  • Combine pyrometer and reflectometer unit to enable emmisivity corrected temperature measurement and control
  • Accurate reflectance and temperature measurement of individual wafers
  • Dedicated computer and electronics.

DRT-210 Real Time In-Situ Monitoring System (quantity = 1)

  • Integrated Deflectometer, Reflectometer and Thermometer to monitor curvature of Epi-Wafer, layer thickness and Refractive Index and wafer pocket temperature with wafer reflection compensation

Server PC for Nexus Datalogging (rackmount)

Nexus Control & Monitoring Software

  • Spreadsheet recipe generation
  • Automatic calculations simplifying injector block parameters and bubbler parameters
  • Operator interface
  • Variety of selectable monitoring functions
  • Maintenance
  • Remote access
  • Data management

 

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